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| Megasonic Shower Specification | |||||
| Mode | MS-080 | MS-380 | MS-580 | MS-870 | MS-1320 |
| Output efficiency | 100 Wmax | 450 Wmax | 700 Wmax | 1100 Wmax | 1500Wmax |
| Output control | 2~100 % | ||||
| Frequency | 1MHz ( 1.5 MHz) | ||||
| Flow rate | 8 ℓ /min | 30 ℓ/min | 42 ℓ /min | 60ℓ/min | 90ℓ/min |
| Weight | ≒ 1.5 kg | ≒.5 kg | ≒ 6 kg | ≒ 8 kg | ≒ 15 kg |
| T/D plate | SUS 316L ( Tantal plate ) | ||||
| Body | SUS316L or PP or PVDF | ||||
