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| Model | MW-1600TD | MW-2800TD | MW-300TD |
| Allowance input power | 1200Wmax |
2400Wmax (3600Wmax) |
2400Wmax (3600Wmax) |
| Frequency | 970 kHz±25kHz ( or 750 kHz±25kHz or 430 kHz) | ||
| Plate material | SUS316L(or Quartz) | ||
| Using water temp | 50℃ max | ||
| Effective size | 136L×163W | (215L×175)+(215L×175) | 273L×327W |
| Wafer | 6”×25 PCS | 8”×50 PCS | 12”×50 PCS |
| Generator Model |
MW-1200AP-12×1 (MW-0609AP-06×2) |
MW-1200AP-12×2 (MW-0609AP-09×4) |
MW-1200AP-12×2 (MW-0609AP-09AP×4) |
